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Trace moisture measurement has critical importance for many petrochemical processes such as Olefin production. The SpectraSensors SS2100 analyzer, which has been developed to measure trace moisture in Olefins product streams based on wavelength modulation spectroscopy is presented. A differential measurement scheme is employed to eliminate the interference from background gases (e.g. ethylene and/or propylene). Moisture can be accurately measured in the 0 ~ 3 x 10 -6 range. A repeatability (3) of (5~10) 10-8 has been demonstrated for moisture detection in Ethylene and Propylene. An excellent repeatability  (3) of (2~6) 10-8 has been successfully demonstrated for moisture detection in other hydrocarbons such as various Alkane. Demonstration experiments confirm the sensitivity and accuracy of the analyzer.